适用领域
HOME - 适用领域适用领域
吉佳蓝是专门制造等离子体蚀刻设备和纳米压印机设备的公司。
在以下多个领域展示优秀性能，正在扩大市场，持续提供尖端产业所需的新解决方案。
| Solutions | Applications | Materials | Products |
|---|---|---|---|
Silicon based Semiconductor |
Memory Device Logic Device Discrete Device |
Poly-Si, SiO2, SiN, Al, Ti, PR, PI... |
ICP Etcher CCP Etcher |
Compound Semiconductor |
Optical Device Power & RF Device Piezo Device |
GaN, GaAs, AlGaInP, InP, AlN, SiC, LT, LN... |
ICP Etcher LED Etcher Imprinter |
MEMS |
MEMS Sensor TSV Micro-Lens |
Si, SiO2, Au... | DRIE Etcher ICP Etcher Imprinter |
Micro & Nano Patterning |
Nano-Rod WGP, Meta-pattern Micro-Lens |
UV-resin (High-RI, Hydrophilic...) |
Imprinter DRIE Etcher ICP Etcher |